Optical characterization at 7.7 µm of an integrated platform based on chalcogenide waveguides for sensing applications in the mid-infrared.

@article{GutierrezArroyo2016OpticalCA,
  title={Optical characterization at 7.7 µm of an integrated platform based on chalcogenide waveguides for sensing applications in the mid-infrared.},
  author={Aldo Gutierrez-Arroyo and Emeline Baudet and Lo{\"i}c Bodiou and Jonathan Lemaitre and Isabelle Hardy and François Faijan and Bruno Bureau and Virginie Nazabal and Jo{\"e}l Charrier},
  journal={Optics express},
  year={2016},
  volume={24 20},
  pages={
          23109-23117
        }
}
A selenide integrated platform working in the mid-infrared was designed, fabricated and optically characterized at 7.7 µm. Ge-Sb-Se multilayered structures were deposited by RF magnetron sputtering. Using i-line photolithography and fluorine-based reactive ion etching, ridge waveguides were processed as Y-junction, spiral and S-shape waveguides. Single-mode optical propagation at 7.7 µm was observed by optical near-field imaging and optical propagation losses of 2.5dB/cm are measured. Limits of… CONTINUE READING
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