Optical broadband monitoring of conventional and ion processes

@inproceedings{Ristau2004OpticalBM,
  title={Optical broadband monitoring of conventional and ion processes},
  author={Detlev Ristau and Tobias Gross and Marc Lappschies},
  year={2004}
}
This contribution is focussed on applications of spectroscopic methods for the precise control of deposition processes. Different approaches for online spectroscopy on the growing layer systems will be evaluated for conventional and ion processes.