Optical and mechanical characterization of evaporated SiO(2) layers. Long-term evolution.

@article{Scherer1996OpticalAM,
  title={Optical and mechanical characterization of evaporated SiO(2) layers. Long-term evolution.},
  author={Kerstin Scherer and L Nouvelot and Philippe Lacan and Robert Bosmans},
  journal={Applied optics},
  year={1996},
  volume={35 25},
  pages={5067-72}
}
Numerous characterizations were performed on 120-nm thick evaporated SiO(2) layers in order to understand how their features change as a function of deposition conditions and time. Density decreases with increasing deposition pressure. It governs all the layer properties (refractive index, hardness, and stress). In situ stress measurements show that stress… CONTINUE READING