Optical Properties and Real Application of New Photoimageable Bonding Adhesives

@article{Kubicki2016OpticalPA,
  title={Optical Properties and Real Application of New Photoimageable Bonding Adhesives},
  author={W. Kubicki and R. Walczak and J. Dziuban},
  journal={Procedia Engineering},
  year={2016},
  volume={168},
  pages={1402-1405}
}
Abstract A new type of negative-tone photoresists devoted to permanent sealing of micromechanical structures have been developed recently. These photoimageable bonding adhesives provide superior adhesion to glass and silicon towards simplified fabrication of MOEMS and lab-on-a-chip devices, but their other features are still under investigation. In this paper, we present the first results on measurement of main optical properties and real application of these new materials. Planar waveguides of… Expand
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