Optical Properties and London Dispersion Forces of Amorphous Silica Determined by Vacuum Ultraviolet Spectroscopy and Spectroscopic Ellipsometry

  title={Optical Properties and London Dispersion Forces of Amorphous Silica Determined by Vacuum Ultraviolet Spectroscopy and Spectroscopic Ellipsometry},
  author={G. L. Tan and Michael F. Lemon and Roger H. French},
Precise and accurate knowledge of the optical properties of amorphous silica is important because of the increasing application of SiO2 in optical and electrooptical devices, including photolithography masks for semiconductor fabrication, recently as a potential 157 nm mask substrate. The optical properties in the vacuum ultraviolet (VUV) region have been investigated, because they convey detailed information on the electronic structure and interatomic bonding of the material. In this work, we… CONTINUE READING
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