Optical MEMS technology for telecommunication

@article{Chang2004OpticalMT,
  title={Optical MEMS technology for telecommunication},
  author={Chorng-Ping Chang},
  journal={Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004.},
  year={2004},
  volume={3},
  pages={1981-1986 vol.3}
}
This paper presents an overview of optical MEMS technology - processing, devices and reliability issues, for telecommunication applications. Common MEMS processing techniques such as surface micromachining, bulk micromachining and wafer/chip bonding are first outlined, with details and examples. For optical network infrastructure, MEMS for optical cross connects, gain equalizers, add-drop multiplexers, WDM/DWDM switches and others are highlighted. Finally, significant knowledge has been gained… CONTINUE READING

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