Optical MEMS electrostatic actuators with various beam configurations


The electro statically actuated clamped-clamped beam and cantilever beam with ground electrodes have been simulated using finite element method (FEM) and presented in this paper. The performance analysis of both MEMS actuators have been carried out and the pull in voltages for different dimensions of the beams were estimated. The beam structural… (More)


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@article{Geetha2008OpticalME, title={Optical MEMS electrostatic actuators with various beam configurations}, author={D. Mohana Geetha and M. Madheswaran}, journal={2008 International Conference on Recent Advances in Microwave Theory and Applications}, year={2008}, pages={757-760} }