Optical Lever Based Parylene Cantilevers for Biochemical Sensing

  title={Optical Lever Based Parylene Cantilevers for Biochemical Sensing},
  author={Kuncheng Zheng and Waqas Khalid and Zhuo Wang and Yuefa Li and Rakesh B. Katragadda and Yongjun Zhao and Qiao Ming Lin and Yong Xu},
This paper reports the development of optical lever based parylene cantilevers for biochemical sensing. A simple but effective process to fabricate parylene cantilevers using Tetramethylammonium Hydroxide (TMAH) bulkmicromachining was demonstrated. A scheme of using anchoring holes was employed to prevent the peeling off of parylene during TMAH etching. Moreover, ridge structures were incorporated on the cantilever tip to achieve a flat surface for a well-controlled reflected laser spot. An… CONTINUE READING

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