Optical Fiber Fabry–Pérot Pressure Sensor Based on a Polymer Structure

Abstract

A novel optical MEMS pressure sensor with a SU-8 microstructure is proposed. SU-8 photoresist is used to form the high aspect ratio structure on silicon wafer. The advantage of the novel structure mainly lies in the design of separating sensing membrane deformation with the length change of Fabry-Pérot cavity. The principle of the pressure… (More)

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Cite this paper

@article{Dai2013OpticalFF, title={Optical Fiber Fabry–Pérot Pressure Sensor Based on a Polymer Structure}, author={Lihua Dai and Ming Wang and Dongyan Cai and Hua Rong and Jiali Zhu and Sheng Hua Jia and Jingjing You}, journal={IEEE Photonics Technology Letters}, year={2013}, volume={25}, pages={2505-2508} }