Optical Characteristics of Polycrystalline 3C-SiC for Harsh Environments

@article{Jeong2007OpticalCO,
  title={Optical Characteristics of Polycrystalline 3C-SiC for Harsh Environments},
  author={Junho Jeong and Gwiy-Sang Chung},
  journal={2007 8th Siberian Russian Workshop and Tutorial on Electron Devices and Materials},
  year={2007},
  pages={34-36}
}
Raman spectra of poly (polycrystalline) 3C-SiC thin films, which were deposited on the oxidized Si substrate by APCVD, have been measured. They were used to study the mechanical characteristics of poly 3C-SiC grown in various temperatures. TO and LO modes of 2.0 mum poly 3C-SiC grown at 1180degC occurred at 794.4 and 965.7 cm-1. Their FWHMs (full width half maximum) were used to investigate the stress and the disorder of 3C-SiC. The broad FWHM can explain that the crystallinity of 3C-SiC grown… CONTINUE READING
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