Optical Characteristics of Polycrystalline 3C-SiC for Harsh Environments

  title={Optical Characteristics of Polycrystalline 3C-SiC for Harsh Environments},
  author={Junho Jeong and Gwiy-Sang Chung},
  journal={2007 8th Siberian Russian Workshop and Tutorial on Electron Devices and Materials},
Raman spectra of poly (polycrystalline) 3C-SiC thin films, which were deposited on the oxidized Si substrate by APCVD, have been measured. They were used to study the mechanical characteristics of poly 3C-SiC grown in various temperatures. TO and LO modes of 2.0 mum poly 3C-SiC grown at 1180degC occurred at 794.4 and 965.7 cm-1. Their FWHMs (full width half maximum) were used to investigate the stress and the disorder of 3C-SiC. The broad FWHM can explain that the crystallinity of 3C-SiC grown… CONTINUE READING
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Referenced Papers

Publications referenced by this paper.
Showing 1-4 of 4 references

Sensors & Actuators A

  • L. Jiang, R. Cheung, +5 authors C. A. Zorman
  • vol. 128, 376,
  • 2006
Highly Influential
3 Excerpts

Applied Surface Science

  • W. L. Zhu, J. L. Zhu, S. Nishino, G. Pezzotti
  • vol. 252, 2346,
  • 2006
2 Excerpts


  • A. C. Ferrari, J. Robertson
  • Rev. B, vol 61, 14095,
  • 2000

Thin Solid Films

  • M. Mehregany, C. A. Zorman
  • vol. 355-356, 518,
  • 1999
2 Excerpts

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