Opportunities for SUEX dry laminate resist in microfluidic MEMS applications


Microfluidics applications can benefit from a dry film approach in multiple ways – particularly in the preparation of multi-layer, multi-level fluidic channels and structures on patternable substrates and covers [1,2,3,4]. Of special benefit is the extreme simplicity in the use of the dry film sheets. A standard lamination approach allows one to apply the resist sheets as well as image them within minutes and, in addition, provides a coating with no edge bead and no solvent gradient through the film. With the added benefit of reduced baking times, and the use of polymer substrates, which eliminates the debonding of the final devices from a rigid silicon or glass base, the approach results in processing times of about 2 days for a 3-layer, all-polymer device. Furthermore, multi-level structures can be imaged at one time with extreme precision and sub-micrometer feature details when using x-ray exposures. Research examples from densely packed, high-aspect ratio post arrays [5], polymer microreactors [6], and biosensor devices [7] show outstanding structure fidelity as well as very high aspect ratios and structural details of sub-micron resolution. Recently, first results have been published [8,910] showing examples of structure quality and possible applications.

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@inproceedings{Johnson2012OpportunitiesFS, title={Opportunities for SUEX dry laminate resist in microfluidic MEMS applications}, author={Donald W. Johnson and Jost Goettert and Varshni Singh and Dawit G Yemane}, year={2012} }