Operating a radio-frequency plasma source on water vapor.

  title={Operating a radio-frequency plasma source on water vapor.},
  author={Sonca V. T. Nguyen and John E. Foster and Alec D. Gallimore},
  journal={The Review of scientific instruments},
  volume={80 8},
A magnetically enhanced radio-frequency (rf) plasma source operating on water vapor has an extensive list of potential applications. In this work, the use of a rf plasma source to dissociate water vapor for hydrogen production is investigated. This paper describes a rf plasma source operated on water vapor and characterizes its plasma properties using a Langmuir probe, a residual gas analyzer, and a spectrometer. The plasma source operated first on argon and then on water vapor at operating… CONTINUE READING


Publications referenced by this paper.

S . R . V . I . Demidov and K . Rypdal

  • E. Krasheninnikov
  • IEEE Trans . Plasma Sci .
  • 2005

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