One-step Nanofabrication of Diffractive Structure via Focused Ion Beam Scanning on Glass

@inproceedings{Fu2003OnestepNO,
  title={One-step Nanofabrication of Diffractive Structure via Focused Ion Beam Scanning on Glass},
  author={Yongqi Fu and Haixia Qian and Ngoi Kok Ann Bryan and Wei Zhou},
  year={2003}
}
A diffractive structure was obtained by directly scanning on a glass substrate in an area of 25×20 μm by use of focused ion beam (FIB) with energy of 30 keV and beam current of 1 nA. It is a one-step, and pattern transfer free process. Ripples with regular shape and geometric size were observed on glass after FIB scanning. The ripples can be used as… CONTINUE READING