• Computer Science
  • Published 2015

One kind of overlay alignment mark

@inproceedings{2015OneKO,
  title={One kind of overlay alignment mark},
  author={程晋广 and 王雷},
  year={2015}
}
The present invention discloses an overlay alignment mark, the measurement flag will be divided into two groups X and Y pattern, X is a group of graphical shape or square blocks back layer pattern applied when the vertical front layer graphics, Y is a group of graphical shape or square block back when the pattern layer of the front layer pattern plus level; the former is a single layer pattern of lines or gaps. The present invention is labeled X and Y separately, the alignment marks of improved… CONTINUE READING

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