One-dimensional fluid model for an rf methane plasma of interest in deposition of diamond-like carbon layers

@inproceedings{Herrebout2004OnedimensionalFM,
  title={One-dimensional fluid model for an rf methane plasma of interest in deposition of diamond-like carbon layers},
  author={D. Herrebout and Annemie Bogaerts and Mao Yan and Renaat H. Gijbels and W. J. Goedheer},
  year={2004}
}
A one-dimensional ~1D! model for a methane rf plasma consisting of 20 species ~neutrals, radicals, ions, and electrons! is presented. The equations solved are the particle balances, assuming a drift-diffusion approximation for the fluxes, and the electron energy balance equation. The self-consistent electric field is obtained from the simultaneous solution of Poisson’s equation. The electron–neutral collision rates are expressed as a function of the average electron energy. These expressions… CONTINUE READING

References

Publications referenced by this paper.

Svela, NASA Report, NASA-TR-132 ~1962

Herrebout
J. Appl. Phys., • 2001

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