One-Time-Programmable Memory in LTPS TFT Technology With Metal-Induced Lateral Crystallization

@article{Li2012OneTimeProgrammableMI,
  title={One-Time-Programmable Memory in LTPS TFT Technology With Metal-Induced Lateral Crystallization},
  author={Lin Li and Chi On Chui and Jin He and Mansun Chan},
  journal={IEEE Transactions on Electron Devices},
  year={2012},
  volume={59},
  pages={145-150}
}
A simple and reliable one-time-programmable (OTP) memory for low-temperature polysilicon thin-film-transistor technology with metal-induced lateral crystallization (MILC) is developed. The antifuse memory element is based on the breakdown of thin silicon dioxide deposited on smooth surface achieved by MILC. The effects of crystallization process and electrode configurations on the memory characteristics, including statistical variations, are studied. A read current margin of 106 is achieved for… CONTINUE READING
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Showing 1-10 of 22 references

Large grain polycrystalline silicon by low-temperature annealing of low-pressure chemical vapor deposited amorphous silicon films

  • M. K. Hatalis, D. W. Greve
  • J. Appl. Phys., vol. 63, no. 7, pp. 2260–2266…
  • 1988
Highly Influential
8 Excerpts

Electrical analysis of high-mobility poly-Si TFTs made from laser-irradiated sputtered Si films

  • S. Shirai, T. Serikawa
  • IEEE Trans. Electron Devices, vol. 39, no. 2, pp…
  • 1992
Highly Influential
3 Excerpts

Role of gate oxide thickness in controlling short channel effects in polycrystalline silicon thin film transistors

  • A. Valletta, P. Gaucci, +5 authors S. D. Brotherton
  • Appl. Phys. Lett., vol. 95, no. 3, pp. 033507-1…
  • 2009
1 Excerpt

High-speed, short-channel polycrystalline silicon thin-film transistors

  • S. D. Brotherton, C. Glasse, C. Glaister, P. Green, F. Rohlfing, J. R. Ayres
  • Appl. Phys. Lett., vol. 84, no. 2, pp. 293–295…
  • 2004
1 Excerpt

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