On-wafer time-dependent high reproducibility nano-force tensile testing

  • Hoefnagels
  • Published 2017

Abstract

Time-dependent mechanical investigations of on-wafer specimens are of interest for improving the reliability of thin metal film microdevices. This paper presents a novel methodology, addressing key challenges in creep and anelasticity investigations through on-wafer tensile tests, achieving highly reproducible force and specimen deformation measurements and… (More)

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