On-wafer LRM calibration technique using a non-reflecting lossy line of arbitrary length

Abstract

In this paper, a straightfonvard de-embedding method is developed for onwafer coplanar devices. Then the effect of the mechanical length of the reference line, utilized in the implementation of the Line-Reflect-Match LRM and Line-ReflectReflect-Match LRRM, on the free error scattering parameters is investigated. A method for moving the reference calibration… (More)

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