# On the self-excitation mechanisms of plasma series resonance oscillations in single- and multi-frequency capacitive discharges

@article{Schuengel2015OnTS, title={On the self-excitation mechanisms of plasma series resonance oscillations in single- and multi-frequency capacitive discharges}, author={Edmund Schuengel and S Brandt and Ihor Korolov and Aranka Derzsi and Zolt{\'a}n Donk{\'o} and Julian Schulze}, journal={Physics of Plasmas}, year={2015}, volume={22}, pages={043512} }

The self-excitation of plasma series resonance (PSR) oscillations is a prominent feature in the current of low pressure capacitive radio frequency discharges. This resonance leads to high frequency oscillations of the charge in the sheaths and enhances electron heating. Up to now, the phenomenon has only been observed in asymmetric discharges. There, the nonlinearity in the voltage balance, which is necessary for the self-excitation of resonance oscillations with frequencies above the applied…

## 16 Citations

### Electron heating via self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas

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- 2015

The self-excitation of plasma series resonance (PSR) oscillations plays an important role in the electron heating dynamics in capacitively coupled radio-frequency (CCRF) plasmas. In a combined…

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The power absorption dynamics of electrons and the electrical asymmetry effect in capacitive radio-frequency plasmas operated in CF4 and driven by tailored voltage waveforms are investigated…

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A novel method, the so-called electrical asymmetry effect (EAE), is gaining increasing interest for realizing the separate control of the ion flux and ion energy. In this paper, a two-dimensional…

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The electron heating enhancement due to the self-excitation of the plasma series resonance in capacitively coupled plasmas is revisited by a combination of an equivalent circuit model and…

### Control of charged particle dynamics in capacitively coupled plasmas driven by tailored voltage waveforms in mixtures of Ar and CF4

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The charged-particle power absorption dynamics in capacitively coupled plasmas operated in different CF4-Ar gas mixtures and driven by tailored voltage waveforms is experimentally investigated by…

### Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect

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Unequal areas of the powered and grounded electrodes in single-frequency capacitively coupled plasmas (CCPs) are well-known to generate a DC self-bias voltage and an asymmetric plasma response. By…

### Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas

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The kinetic origin of resonance phenomena in capacitively coupled radio frequency plasmas is discovered based on particle-based numerical simulations. The analysis of the spatio-temporal…

### A Simple Model for Ion Flux‐Energy Distribution Functions in Capacitively Coupled Radio‐Frequency Plasmas Driven by Arbitrary Voltage Waveforms

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The ion flux-energy distribution function (IFEDF) is of crucial importance for surface processing applications of capacitively coupled radio-frequency (CCRF) plasmas. Here, we propose a model that…

### Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code

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Phenomena taking place in capacitively coupled plasmas with large electrodes and driven at very high frequencies are studied numerically utilizing a novel energy- and charge-conserving implicit fully…

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