On the self-excitation mechanisms of plasma series resonance oscillations in single- and multi-frequency capacitive discharges
@article{Schuengel2015OnTS, title={On the self-excitation mechanisms of plasma series resonance oscillations in single- and multi-frequency capacitive discharges}, author={Edmund Schuengel and S Brandt and Ihor Korolov and Aranka Derzsi and Zolt{\'a}n Donk{\'o} and Julian Schulze}, journal={Physics of Plasmas}, year={2015}, volume={22}, pages={043512} }
The self-excitation of plasma series resonance (PSR) oscillations is a prominent feature in the current of low pressure capacitive radio frequency discharges. This resonance leads to high frequency oscillations of the charge in the sheaths and enhances electron heating. Up to now, the phenomenon has only been observed in asymmetric discharges. There, the nonlinearity in the voltage balance, which is necessary for the self-excitation of resonance oscillations with frequencies above the applied…
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