A Variable Optical Attenuator Based on Silicon Micromechanics
- Cornel Marxer, Patrick Griss, Nicolaas F. de Rooij
- Systems”, proceedings of the ieee,
A statistical Monte Carlo technique for the performance estimation of optical MEMS components is presented in this paper. The developed technique is applied on the 2x2 moving mirror optical MEMS switch as a typical example to study its performance under realistic passive alignment conditions. The obtained results enable to evaluate the assembly process capability and to analyze the performance sensitivity to different fabrication parameters. This establishes a design for manufacturability technique for the optical MEMS components.