On the monte carlo simulation of optical MEMS components

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@article{Badreldin2004OnTM, title={On the monte carlo simulation of optical MEMS components}, author={Tarek Badreldin and Tarek Saad and Doaa Khalil}, journal={International Conference on Electrical, Electronic and Computer Engineering, 2004. ICEEC '04.}, year={2004}, pages={629-632} }