On the electron energy in the high power impulse magnetron sputtering discharge

@inproceedings{Gudmundsson2009OnTE,
  title={On the electron energy in the high power impulse magnetron sputtering discharge},
  author={Jon Tomas Gudmundsson and Pall Sigurjonsson and Petter E Larsson and Daniel Vuorinen Lundin and Ulf Helmersson},
  year={2009}
}

From This Paper

Figures, tables, and topics from this paper.

Explore Further: Topics Discussed in This Paper

Citations

Publications citing this paper.
SHOWING 1-9 OF 9 CITATIONS

Similar Papers

Loading similar papers…