On the electromechanical modelling of a resonating nano-cantilever-based transducer.

@article{Teva2004OnTE,
  title={On the electromechanical modelling of a resonating nano-cantilever-based transducer.},
  author={J. Teva and Gabriel Abadal and Z. J. Davis and Jaume Verd and X. Borris{\'e} and Anja Boisen and Francesc P{\'e}rez-Murano and N{\'u}ria Barniol},
  journal={Ultramicroscopy},
  year={2004},
  volume={100 3-4},
  pages={225-32}
}
An electromechanical model for a transducer based on a lateral resonating cantilever is described. The on-plane vibrations of the cantilever are excited electrostatically by applying DC and AC voltages from a driver electrode placed closely parallel to the cantilever. The model predicts the static deflection and the frequency response of the oscillation amplitude for different voltage polarization conditions. For the electrostatic force calculation the model takes into account the real… CONTINUE READING