On the Use of Dc Measurements for Esd-related Process Monitoring

  • JAN MARC LUCHIES
  • Published 2007

Abstract

In process development and in production, there is a need for simple and fast evaluation of electrostatic discharge (ESD) behaviour. Automated DC measurements on the wafer would present the fastest alternative provided that there is a clear correlation between DC measurements and ESD behaviour. To assess such H correlation, DC measurements and transmission… (More)

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