On the Design of RF Spiral Inductors on Silicon

  title={On the Design of RF Spiral Inductors on Silicon},
  author={Joachim N. Burghartz and Behzad Rejaei},
This review of design principles for implementation of a spiral inductor in a silicon integrated circuit fabrication process summarizes prior art in this field. In addition, a fast and physics-based inductor model is exploited to put the results contributed by many different groups in various technologies and achieved over the past eight years into perspective. Inductors are compared not only by their maximum quality factors ( max), but also by taking the frequency at max, the inductance value… CONTINUE READING
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