On dual actuation in atomic force microscopes

@article{Rifai2004OnDA,
  title={On dual actuation in atomic force microscopes},
  author={Khalid El Rifai and O. M. El Rifai and Kamal Youcef-Toumi},
  journal={Proceedings of the 2004 American Control Conference},
  year={2004},
  volume={4},
  pages={3128-3133 vol.4}
}
In this paper, a solution to the control problem of dual actuation in atomic force microscopes (AFMs) is presented. The use of two actuators to balance the trade-off between bandwidth, range, and precision has been recently extended to nano-positioning systems. Despite existing demands, this concept undergoes fundamental limitations towards its extension to… CONTINUE READING