On Characterizing Microelectromechanical Processes Using Coupled Resonators

  title={On Characterizing Microelectromechanical Processes Using Coupled Resonators},
  author={Bhaskar Choubey and Steve Collins and M. Ward},
  journal={Journal of Microelectromechanical Systems},
In this paper, a simple method of measuring process-induced variations is proposed using a chain of nominally identical microelectromechanical resonators. The method is based upon the fact that the n eigenfrequencies of a chain of mechanically coupled resonators can be determined from the response of only one resonator in the chain. However, these n values do not provide enough information to determine the 2n - 1 elements of the system matrix. The extra information needed to obtain the system… CONTINUE READING
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