Offset amount calibrating method and surface texture measuring instrument

@inproceedings{2009OffsetAC,
  title={Offset amount calibrating method and surface texture measuring instrument},
  author={泰 福本 and 浩一 小松 and 文宏 竹村 and 貞治 有田 and 平野 宏太郎},
  year={2009}
}
An offset amount calibrating method that obtains the offset amount between a contact-type detector and an image probe is provided. The method includes: setting on a stage a calibration chart (80) that includes not less than two non-parallel linewidth patterns (81A to 81D, 82A to 82D) being disposed relative to a reference position (o) of the calibration chart and each having a known width (w) and a level difference; capturing an image of the linewidth patterns of the calibration chart by an… CONTINUE READING