Observer based determination of the crystal diameter in Czochralski crystal growth utilizing algorithmic differentiation

@article{Winkler2012ObserverBD,
  title={Observer based determination of the crystal diameter in Czochralski crystal growth utilizing algorithmic differentiation},
  author={Jan Winkler and Klaus Robenack},
  journal={International Multi-Conference on Systems, Sygnals & Devices},
  year={2012},
  pages={1-6}
}
This contribution deals with the implementation of a nonlinear state observer (often referred to as smart sensor, soft sensor or virtual sensor) for the reconstruction of not directly measured system quantities in the Czochralski crystal growth process. These quantities are required in automatic control systems used to ensure proper crystal growth. The implementation of the observer on the limited computer hardware available at the growth plants is a challenging task because of the complexity… CONTINUE READING

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