Observation of lens aberrations for high resolution electron microscopy II: simple expressions for optimal estimates.

@article{Saxton2015ObservationOL,
  title={Observation of lens aberrations for high resolution electron microscopy II: simple expressions for optimal estimates.},
  author={W Owen Saxton},
  journal={Ultramicroscopy},
  year={2015},
  volume={151},
  pages={168-177}
}
This paper lists simple closed-form expressions estimating aberration coefficients (defocus, astigmatism, three-fold astigmatism, coma / misalignment, spherical aberration) on the basis of image shift or diffractogram shape measurements as a function of injected beam tilt. Simple estimators are given for a large number of injected tilt configurations, optimal in the sense of least-squares fitting of all the measurements, and so better than most reported previously. Standard errors are given for… CONTINUE READING

From This Paper

Figures, tables, and topics from this paper.

Citations

Publications citing this paper.

References

Publications referenced by this paper.
Showing 1-8 of 8 references

J

  • W. O. Saxton
  • Microsc. 179
  • 1995
Highly Influential
5 Excerpts

A

  • J. Barthel
  • Thust, Ultramicroscopy 111
  • 2010

Microsc

  • A. I. Kirkland, R. R. Meyer, L.-Y. Chang
  • Microanal. 12
  • 2006
1 Excerpt

W

  • A. Steinecker
  • Mader, Ultramicroscopy 81
  • 2000

M

  • S. Uhlemann
  • Haider, Ultramicroscopy 72
  • 1998
1 Excerpt

K

  • D. Typke
  • Dierksen, Optik 99
  • 1995
1 Excerpt

Dierksen, Image Interpretation and Image Processing in Electron Microscopy

  • K. D. Typke
  • Autumn School
  • 1992
1 Excerpt

Scanning Microsc

  • O. L. Krivanek, G. Y. Fan
  • Suppl. 6 (1992)105 Suppl. 6
  • 1992

Similar Papers

Loading similar papers…