Observation of Self-Sputtering in Energetic Condensation of Metal Ions

@inproceedings{Anders2004ObservationOS,
  title={Observation of Self-Sputtering in Energetic Condensation of Metal Ions},
  author={Andr{\'e} Anders},
  year={2004}
}
The condensation of energetic metal ions on a surface may cause self-sputtering even in the absence of substrate bias. Charge-stateaveraged self-sputtering yields were determined for both zirconium and gold ions generated by a cathodic vacuum arc. Films were deposited on differently biased substrates exposed to streaming Zr and Au vacuum arc plasma. The self-sputtering yields for both metals were estimated to be about 0.05 in the absence of bias, and exceeding 0.5 when bias reached – 50 V… CONTINUE READING