Observability and state estimation for multiple product control in semiconductor manufacturing

@article{Pasadyn2005ObservabilityAS,
  title={Observability and state estimation for multiple product control in semiconductor manufacturing},
  author={A. J. Pasadyn and T. F. Edgar},
  journal={IEEE Transactions on Semiconductor Manufacturing},
  year={2005},
  volume={18},
  pages={592-604}
}
Run-to-run control in semiconductor manufacturing is complicated by the use of multiple processing tools and many different products being made during a given time period. This paper investigates a Kalman filter-based state estimation scheme that views a manufacturing area with all the tools, products, and processes it contains as a single interrelated system. This formulation maximizes the amount of information that is shared across different batches by capturing their common characteristics… CONTINUE READING
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