Observability and state estimation for multiple product control in semiconductor manufacturing

  title={Observability and state estimation for multiple product control in semiconductor manufacturing},
  author={A. J. Pasadyn and T. F. Edgar},
  journal={IEEE Transactions on Semiconductor Manufacturing},
Run-to-run control in semiconductor manufacturing is complicated by the use of multiple processing tools and many different products being made during a given time period. This paper investigates a Kalman filter-based state estimation scheme that views a manufacturing area with all the tools, products, and processes it contains as a single interrelated system. This formulation maximizes the amount of information that is shared across different batches by capturing their common characteristics… CONTINUE READING
Highly Cited
This paper has 40 citations. REVIEW CITATIONS


Publications citing this paper.
Showing 1-10 of 26 extracted citations


Publications referenced by this paper.
Showing 1-10 of 11 references

Adaptive control of multiple product processes

  • A. J. Pasadyn, A. J. Toprac, T. F. Edgar
  • Process Control and Diagnostics. ser. Proc SPIE…
  • 2000
1 Excerpt

Estimation focus in system identification: Prefiltering, noise models, and prediction

  • L. Ljung
  • Proc. 38th IEEE Conf. Decision Control, vol. 3…
  • 1999
1 Excerpt

Multi-scale modeling, estimation, and control of processing systems

  • G. Stephanopoulos, M. Dyer, O. Karsligil
  • Comput. Chem. Eng., vol. 21, pp. S797–S803, 1997.
  • 1997
1 Excerpt

Closed-loop identification: The role of the noise model and prefilters

  • J. F. MacGregor, D. T. Fogal
  • J. Proc. Control, vol. 5, no. 3, pp. 163–171…
  • 1995
1 Excerpt

Introduction to Mathematical Statistics, 5th ed

  • R. V. Hogg, A. T. Craig
  • 1995
2 Excerpts

Process Control and Identification

  • W. F. Ramirez
  • New York: Academic,
  • 1994
2 Excerpts

Necessary and sufficient conditions for the complete reachability and observability of multirate sampled-data systems

  • S. Longhi
  • Proc. 31st IEEE Conf. Decision Control, 1992, pp…
  • 1992
1 Excerpt

Similar Papers

Loading similar papers…