Numerical prediction of stress evolution during blowtorch reflow of fused silica micro-shell resonators

@article{Shiari2016NumericalPO,
  title={Numerical prediction of stress evolution during blowtorch reflow of fused silica micro-shell resonators},
  author={Behrouz Shiari and Tal Nagourney and Ali Darvishian and Jae Yoong Cho and Khalil Najafi},
  journal={2016 IEEE International Symposium on Inertial Sensors and Systems},
  year={2016},
  pages={13-16}
}
Micro-blowtorching is a new, fast and reliable fabrication process to form 3D hollow fused silica shell structures such as high Q-factor birdbath resonators. The performance of the fabricated shell as a resonator can be significantly degraded due to the thermal residual stress during the early cooling phase after fabrication. A multi-step finite element analysis is developed for a qualitative prediction of residual stresses and deformation of the birdbath shells. First, a novel non-isothermal… CONTINUE READING

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