Numerical analysis of thickness shear thin film piezoelectric resonators using a laminated plate theory

  title={Numerical analysis of thickness shear thin film piezoelectric resonators using a laminated plate theory},
  author={Zhe Zhang and Y.-K. Yong},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
Finite element matrix equations are derived from a two-dimensional, piezoelectric high frequency laminated plate theory. Two-layer ZnO/Si and three-layer ZnO/SiO/sub 2//Si thin film resonators vibrating at the fundamental thickness shear mode are investigated using the finite element models. Straight crested waves propagating in a resonator are studied. Resonant frequency, mode shapes and electromechanical coupling coefficient of the fundamental thickness shear mode are calculated and presented… CONTINUE READING
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Showing 1-10 of 19 references

Numerical analysis of two dimensional thin film analysis,

  • K. M. Lakin
  • Int. Freq. Cont. Symp.
  • 1993
1 Excerpt

The method of moments for vibrations of piezoelectric laminae

  • M. Cengiz Dokmeci
  • IEEE Ultrasonic Symp., 1992. 746 IEEE…
  • 1992
1 Excerpt

Two dimensional finite difference method for the analysis of piezoelectric devices

  • C. F. Campbell, R. J. Weber
  • IEEE Ultrasonic Symp., 1992.
  • 1992

A two - dimensional theory for high - frequency vibrations of piezoelectric crystal plate with or without electrodes

  • S. Syngellakis, J. P. Hou
  • J . Appl . Phys .
  • 1987

Advances in structure and fabrication process for thin film acoustic resonator

  • Y. Miyasaka, S. Hoshino, S. Takashi
  • IEEE Ultrasonic Symp., 1987.
  • 1987
1 Excerpt

Thin film technology

  • K. M. Lakin, G. R. Kline, +4 authors S. D. Braymen
  • 41st Annu. Freq. Cont. Symp., 1987.
  • 1987
1 Excerpt

A two-dimensional theory for piezoelectric layers used in electro-mechanical transducers—I

  • B. Bugdayci, D. B. Bogy
  • Int. J. Solids Struct., vol. 17, pp. 1159–1178…
  • 1981

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