Numerical analysis of thickness shear thin film piezoelectric resonators using a laminated plate theory

@article{Zhang1995NumericalAO,
  title={Numerical analysis of thickness shear thin film piezoelectric resonators using a laminated plate theory},
  author={Zhe Zhang and Y.-K. Yong},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
  year={1995},
  volume={42},
  pages={734-746}
}
Finite element matrix equations are derived from a two-dimensional, piezoelectric high frequency laminated plate theory. Two-layer ZnO/Si and three-layer ZnO/SiO/sub 2//Si thin film resonators vibrating at the fundamental thickness shear mode are investigated using the finite element models. Straight crested waves propagating in a resonator are studied. Resonant frequency, mode shapes and electromechanical coupling coefficient of the fundamental thickness shear mode are calculated and presented… CONTINUE READING
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