Numerical Simulation of Metal Plasma Immersion Ion Implantation (MePIIID) on a Sharp Cone and a Fine Tip by a Multiple-Grid Particle-in-Cell (PIC) Method

@article{Kwok2006NumericalSO,
  title={Numerical Simulation of Metal Plasma Immersion Ion Implantation (MePIIID) on a Sharp Cone and a Fine Tip by a Multiple-Grid Particle-in-Cell (PIC) Method},
  author={D. Tat-Kun Kwok and Christophe Cornet},
  journal={IEEE Transactions on Plasma Science},
  year={2006},
  volume={34},
  pages={2434-2442}
}
A multiple-grid particle-in-cell (PIC) method in r-z cylindrical coordinates is developed to study metal plasma immersion ion implantation and deposition (MePIIID) of a sharp cone with a fine tip. At the boundary between the coarse and fine grids, the cells are subdivided into smaller regions so that the effective volume of each node does not overlap with… CONTINUE READING