Numerical Path Following as an Analysis Method for Electrostatic MEMS

@article{Stulemeijer2009NumericalPF,
  title={Numerical Path Following as an Analysis Method for Electrostatic MEMS},
  author={Jiri Stulemeijer and J. A. Bielen and P. G. Steeneken and J. B. van den Berg},
  journal={Journal of Microelectromechanical Systems},
  year={2009},
  volume={18},
  pages={488-499}
}
This paper aims to find all static states, including stable and unstable states, of electrostatically actuated microelectromechanical systems (MEMS) device models. We apply the numerical path-following technique to solve for the curve connecting the static states. We demonstrate that device models with 2 DOF can already exhibit symmetry-breaking bifurcations in the curve of static states and can have multiple disjoint solution paths. These features are also found in a finite-element method (FEM… CONTINUE READING
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