Numerical Path Following as an Analysis Method for Electrostatic MEMS

  title={Numerical Path Following as an Analysis Method for Electrostatic MEMS},
  author={Jiri Stulemeijer and J. A. Bielen and P. G. Steeneken and J. B. van den Berg},
  journal={Journal of Microelectromechanical Systems},
This paper aims to find all static states, including stable and unstable states, of electrostatically actuated microelectromechanical systems (MEMS) device models. We apply the numerical path-following technique to solve for the curve connecting the static states. We demonstrate that device models with 2 DOF can already exhibit symmetry-breaking bifurcations in the curve of static states and can have multiple disjoint solution paths. These features are also found in a finite-element method (FEM… CONTINUE READING
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High-stability numerical algorithm for the simulation of deformable electrostatic MEMS devices

  • X. Rottenberg, B. Nauwelaers, W. de Raedt, D. Elata
  • Proc. Nanotech, Boston, MA, 2008, pp. 501–504.
  • 2008
1 Excerpt

The static behavior of RF MEMS capacitive switches in contact

  • H.M.R. Suy, R. W. Herfst, P. Steeneken, J. Stulemeijer, J. Bielen
  • Proc. Nanotech, Boston, MA, 2008, vol. 3, pp. 517…
  • 2008
1 Excerpt

Bifurcation analysis using Comsol multiphysics

  • J. Möller, C. C. Ab
  • Proc. Nordic COMSOL Conf., 2006, pp. 1541–1544.
  • 2006
1 Excerpt

Microelectromechanical tunable capacitors for reconfigurable RF architectures

  • T.G.S.M. Rijks, P. G. Steeneken, +5 authors R. Puers
  • J. Micromech. Microeng., vol. 16, no. 3, pp. 601…
  • 2006
1 Excerpt

Multi-parameter homotopy for the numerical analysis of MEMS

  • E. R. König, G. Wachutka
  • Sens. Actuators A, Phys., vol. 110, no. 1–3, pp…
  • 2004
1 Excerpt

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