Numerical Analysis of Tuning Procedure of a Waveguide-Based Microwave Plasma Source

  title={Numerical Analysis of Tuning Procedure of a Waveguide-Based Microwave Plasma Source},
  author={Helena Nowakowska and Mariusz Jasiński and Jerzy Mizeraczyk},
  journal={IEEE Transactions on Plasma Science},
Numerically obtained electric field module distributions inside a waveguide-based high-flow microwave plasma source (MPS) with a plasma column inside during a tuning procedure that employs a microwave plunger are presented. Standing-wave patterns have been obtained for each plunger position. The optimal position of the plunger has been found. Strong skin effect is seen in the plasma generated in the presented MPS. 

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