• Materials Science, Engineering
  • Published in Other Conferences 2001
  • DOI:10.1117/12.444719

Novel silicon-micromachined gyroscope with high Q at atmosphere

@inproceedings{Xiong2001NovelSG,
  title={Novel silicon-micromachined gyroscope with high Q at atmosphere},
  author={Bin Xiong and Yuelin Wang and Lufeng Che and Weiyuan Wang},
  booktitle={Other Conferences},
  year={2001}
}
In this paper, the design, fabrication and test of a novel silicon micromachined gyroscope were presented. The device structure which we called fence gyro consists of a proof mass with bars linked up to substrate by suspend springs and is fabricated by silicon-glass bonding and deep reactive ion etching (DRIE). The proof mass is used as both the movable- driving electrodes and movable-sensing electrodes. The fixed cross-driving electrodes and cross-sensing electrodes under the proof mass are… CONTINUE READING

Citations

Publications citing this paper.

References

Publications referenced by this paper.
SHOWING 1-10 OF 11 REFERENCES

A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes

Pisano and Roger T . Howe , " Viscous damping model for laterally oscillating microstructures

  • Baoqing Li, Deren Lu, Weiyuan Wang, Young-Ho Cho, P Albert
  • IEEE J . Microelectromech . Syst .
  • 1999

de Rooij , " Improved design of a silicon micromachined gyroscope with piezoresistive detection and electromagnetic excitation

  • F Nicolaas
  • Sensors and Actuators , A
  • 1999

H.Munzel and U.Bischof, "A precision yaw rate sensor in silicon micromachining,

  • M.Lutz, W.Goldere, +3 authors S.Mahler
  • Digest of technical papers of The 9th International Conference on Solid State Sensors and Actuators, Transducers'97, Chicage,
  • 1997

Analysis ofhighly sensitive silicon gyroscope with cantilever beam as vibrating mass,

  • K.Maenaka, T.Fujita, Y.Konishi, M. Maeda
  • Sensors and Actuators, A54,
  • 1996

Pisano and Roger T . Howe , " Slide film damping in laterally driven microstructures , " Sensors and Actuators , A 40 , pp 3 1 - 39 , 1994

  • Young-Ho Cho, Byung Man Kwak, P Albert
  • IEEE J . Microelectromech . Syst .
  • 1994

T.Howe, "Slide film damping in laterally driven microstructures,

  • Young-Ho Cho, Byung Man Kwak, Albert P.Pisano, Roger
  • Sensors and Actuators,
  • 1994