Novel low-voltage RF-MEMS switch: Design and simulation

  title={Novel low-voltage RF-MEMS switch: Design and simulation},
  author={Ma Li Ya and Norhayati Soin and Anis Nurashikin Nordin},
  journal={2014 IEEE International Conference on Semiconductor Electronics (ICSE2014)},
This paper presents a novel design of a low-voltage radio frequency (RF) micro-electromechanical system (MEMS) switch with its electro-mechanical and microwave characteristics' simulation, as well as its virtual fabrication process. The RF-MEMS switch employs a shunt capacitive structure. There are eight beams supporting a rectangular membrane to suspend over a coplanar waveguide (CPW) transmission line. The outer four crab-leg beams are used to bypass the signal line to the ground by the… CONTINUE READING