Novel high-performance TFTs fabricated by selectively enlarging laser x'tallization (SELAX) technology

@inproceedings{Yamaguchi2003NovelHT,
  title={Novel high-performance TFTs fabricated by selectively enlarging laser x'tallization (SELAX) technology},
  author={Ssdaichi Yamaguchi and Mutsuko Hatano and Seong-Kee Park and Mitsuharu Tai and Takeo Shiba},
  booktitle={IS&T/SPIE Electronic Imaging},
  year={2003}
}
We have developed a new crystallization technique using the EO-modulated CW-laser (LD-pumped Nd:YVO4 SHG λ=532nm). Enlarging of lateral crystallization is attained by rapid laser-scanning on Si surface where the large (4μm × 0.5μm in average) columnar grains are uniformly obtained. Sequential and step-by-step scanning makes large crystallization areas. During the each scanning, the irradiation is frequently suspended by pulse-like modulation. By using this technique, in-plane tensile strain in… CONTINUE READING