Novel aspect in grain size control of nanocrystalline diamond film for thin film waveguide mode resonance sensor application.


Nanocrystalline diamond (NCD) thin film growth was systematically investigated for application for the thin film waveguide mode resonance sensor. The NCD thin film was grown on the Si wafer or on the SiO2-coated sapphire substrate using the hot filament chemical vapor deposition (HFCVD). The structural/optical properties of the samples were characterized by… (More)
DOI: 10.1021/am403066k


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