Novel approach to fabricating carbon nanotube via interconnects using size-controlled catalyst nanoparticles

@article{Sato2006NovelAT,
  title={Novel approach to fabricating carbon nanotube via interconnects using size-controlled catalyst nanoparticles},
  author={Shintaro Sato and Mizuhisa Nihei and Akihiro Mimura and Akio Kawabata and Daiyu Kondo and Hideo Shioya and Taisuke Iwai and Miho Mishima and Mari Ohfuti and Yuji Awano},
  journal={2006 International Interconnect Technology Conference},
  year={2006},
  pages={230-232}
}
We propose a new approach to fabricating carbon nanotube (CNT) vias, which uses preformed catalyst nanoparticles to grow CNTs. A newly-designed impactor provided size-classified catalyst particles, and a new deposition system injected them into via holes down to 40 nm in diameter. The resultant CNT-via resistance was 0.59 Omega for 2-mum vias, which is the lowest ever reported, improved from the previous studies using catalyst films. The improvement resulted from higher-density CNTs grown in… CONTINUE READING
Highly Cited
This paper has 36 citations. REVIEW CITATIONS