Novel SCR structure for power supply protection in FinFET technology

@article{Peng2017NovelSS,
  title={Novel SCR structure for power supply protection in FinFET technology},
  author={Po-Lin Peng and Li-Wei Chu and Y. C. Chang and Wun-Jie Lin and Chia-Wei Hsu and Kuo-Ji Chen and Ming-Hsiang Song and Jam-Wem Lee},
  journal={2017 39th Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD)},
  year={2017},
  pages={1-6}
}
A FinFET SCR embedded ESD clamp for power supply protection with low leakage current is demonstrated. The proposed clamp is suitable for low power applications since it reduces ∼87% of leakage current per bigFET width and improves ESD robustness to ∼2X per footprint compared to the conventional RC-triggered clamp.