Novel Reliable RF Capacitive MEMS Switches With Photodefinable Metal–Oxide Dielectrics


In this paper, the design, fabrication, and measurement of reliable low-cost capacitive radio-frequency microelectromechanical systems switches with a novel fabrication approach using direct photodefinable high-k metal oxides are presented. In this approach, a radiation-sensitive metal-organic precursor is deposited via spin coating and converted to a high… (More)


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