Novel, Sem-Based Method for Wafer Inspection Recipe Optimization

@article{Stamper2007NovelSM,
  title={Novel, Sem-Based Method for Wafer Inspection Recipe Optimization},
  author={Andrew D Stamper and Sang Y Chong and Kourosh Nafisi and Petra Feichtinger and Wee Teck Chia and Danfoss Randall and Archit Khullar},
  journal={2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference},
  year={2007},
  pages={195-200}
}
This paper describes a novel route to brightfield (BF) wafer inspector recipe setup leading to substantially shortened recipe setup time and improved recipe quality. The traditional BF recipe optimization process involves adjusting several inspection parameters necessitating multiple iterations between the BF inspector and SEM review tool. Not only is… CONTINUE READING