Note: Multiscale scanning probe microscopy.


Combining the nanoscopic and macroscopic worlds is a serious challenge common to numerous scientific fields, from physics to biology. In this paper, we demonstrate nanometric resolution over a millimeter range by means of atomic-force microscopy using metrological stage. Nanometric repeatability and millimeter range open up the possibility of probing components and materials combining multiscale properties i.e., engineered nanomaterials. Multiscale probing is not limited to atomic-force microscopy and can be extended to any type of scanning probe technique in nanotechnology, including piezoforce microscopy, electrostatic-force microscopy, and scanning near-field optical microscopy.

DOI: 10.1063/1.3473935

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@article{Chassagne2010NoteMS, title={Note: Multiscale scanning probe microscopy.}, author={Luc Chassagne and Sylvain Blaize and Pascal Ruaux and Selda Topcu and Pascal Royer and Yasser Alayli and Gilles L{\'e}rondel}, journal={The Review of scientific instruments}, year={2010}, volume={81 8}, pages={086101} }