Nonlinearities in single-crystal silicon micromechanical resonators

@article{Kaajakari2003NonlinearitiesIS,
  title={Nonlinearities in single-crystal silicon micromechanical resonators},
  author={V. Kaajakari and T. Mattila and J. Kiihamaki and H. Kattelus and A. Oja and H. Seppa},
  journal={TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)},
  year={2003},
  volume={2},
  pages={1574-1577 vol.2}
}
  • V. Kaajakari, T. Mattila, +3 authors H. Seppa
  • Published 2003
  • Engineering
  • TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
  • The fundamental performance limit of single-crystal silicon resonators set by device nonlinearities in characterized. Using Leeson's model for near carrier phase noise, the nonlinearity is shown to set the scaling limit in miniaturizing oscillators. A circuit model based on discretization of distributed mass and nonlinear elasticity is introduced to accurately simulate the large amplitude vibrations. Based on published data for the third-order silicon stiffness tensor, the fundamental material… CONTINUE READING
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