Nonlinearities in single-crystal silicon micromechanical resonators

@article{Kaajakari2003NonlinearitiesIS,
  title={Nonlinearities in single-crystal silicon micromechanical resonators},
  author={Ville Kaajakari and Tomi Mattila and J. Kiihamaki and Hannu P. Kattelus and Alexander Oja and H.. Seppa},
  journal={TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)},
  year={2003},
  volume={2},
  pages={1574-1577 vol.2}
}
The fundamental performance limit of single-crystal silicon resonators set by device nonlinearities in characterized. Using Leeson's model for near carrier phase noise, the nonlinearity is shown to set the scaling limit in miniaturizing oscillators. A circuit model based on discretization of distributed mass and nonlinear elasticity is introduced to accurately simulate the large amplitude vibrations. Based on published data for the third-order silicon stiffness tensor, the fundamental material… CONTINUE READING

Citations

Publications citing this paper.
SHOWING 1-10 OF 18 CITATIONS

Modeling and simulation of micro electromechanical (MEM) beam resonator-based oscillators

  • 2008 IEEE International Symposium on Circuits and Systems
  • 2008
VIEW 4 EXCERPTS
CITES BACKGROUND
HIGHLY INFLUENCED

Nonlinearity characteristic of disk resonator

  • IEEE SENSORS 2014 Proceedings
  • 2014
VIEW 1 EXCERPT
CITES BACKGROUND

Nonlinear oscillation characteristics of MEMS resonator

  • 2010 IEEE International Conference on Mechatronics and Automation
  • 2010
VIEW 1 EXCERPT
CITES BACKGROUND

Digitally-tunable mems filter using mechanically-coupled resonator array

  • 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems
  • 2008
VIEW 1 EXCERPT
CITES BACKGROUND

References

Publications referenced by this paper.
SHOWING 1-9 OF 9 REFERENCES

12 MHz Micromechanical Bulk Acoustic Mode Oscillator

T. Mattila
  • Sensors and Actuators A 101,
  • 2002
VIEW 4 EXCERPTS
HIGHLY INFLUENTIAL

Square-extensional mode single-crystal silicon micromechanical RF-resonator

  • TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
  • 2003
VIEW 1 EXCERPT

Drive level dependence of the resonant frequency in BAW quartz resonators and his modeling

  • IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
  • 1999
VIEW 1 EXCERPT

Mechanics

L. D. Landau, E. M. Lifshitz
  • 3rd ed.,
  • 1999
VIEW 1 EXCERPT

The Design of CMOS Radio-Frequency Integrated Circuits

T. Lee
  • 1998
VIEW 1 EXCERPT

Phase Noise in Oscillators: A Mathematical Analysis of Leeson's Model

  • IEEE Transactions on Instrumentation and Measurement
  • 1977
VIEW 1 EXCERPT

Similar Papers

Loading similar papers…