Nonlinear Mechanical Effects in Silicon Longitudinal Mode Beam Resonators

  title={Nonlinear Mechanical Effects in Silicon Longitudinal Mode Beam Resonators},
  author={Ville Kaajakari and Tomi Mattila and Antti Lipsanen and Aarne S. Oja},
The fundamental nonlinear mechanical effects in micromachined single-crystal silicon resonators are inve stigated. Longitudinal mode beam resonators are chosen for the analys is due to their simple geometry and high quality factor (Q > 100 000). Analytical model for the resonator is developed in terms of nonlinear engineering Young’s modulus that incorporates both geometrical and material effects. For comparison with the t heory, beam resonators were fabricated in two different crystalli ne… CONTINUE READING
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