Noninvasive picosecond ultrasonic detection of ultrathin interfacial layers: CFx at the Al/Si interface

Abstract

A picosecond ultrasonics technique has been used to detect interfacial fluorocarbon (CF,) layers as thin as 0.5 nm between aluminum and silicon. The presence of the CF, material reduces acoustic damping and heat loss from the Al film into the Si substrate. This provides a means for noninvasive identification of organic/polymeric contaminants at the buried interface and potentially for characterizing inter-facial mechanical properties.

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Cite this paper

@inproceedings{Ta1999NoninvasivePU, title={Noninvasive picosecond ultrasonic detection of ultrathin interfacial layers: CFx at the Al/Si interface}, author={G{\"{u}ltekin Taş and Richard J. Stoner and Jean-Mark Halbout}, year={1999} }