Nonequilibrium Radiation Effects in Vlsi

@article{Bradford1978NonequilibriumRE,
  title={Nonequilibrium Radiation Effects in Vlsi},
  author={John Norman Bradford},
  journal={IEEE Transactions on Nuclear Science},
  year={1978},
  volume={25},
  pages={1144-1145}
}
The recent flurry of projections of Very Large Scale Integration circuitry coupled with the successes achieved in using synchrotron radiation as a source for photo resist exposurel has prompted a review of the impact of small size on radiation effects test and evaluation procedures. Nonuniform distribution effects show up in dosimetry when the dimensions of the region of interest are approximate to the ranges of the electrons involved. Recent development of interface dose enhancement phenomena2… CONTINUE READING

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