Non-tilting out-of-plane mode high-Q mechanical silicon oscillator

  title={Non-tilting out-of-plane mode high-Q mechanical silicon oscillator},
  author={Ossi M. Hahtela and Nikolai Chekurov and Ilkka Tittonen},
A single-crystal silicon oscillator with a non-tilting out-of-plane vibrational mode and high-quality factor for the mechanical resonance was designed, fabricated and characterized. The finite-element method (FEM) was utilized before the fabrication process to simulate the oscillator behavior and give guidance in optimizing the design. At low pressure p =10−3 mbar and at room temperature, the resonance frequency and Q value were measured to be f0 = 26 526 Hz and Q = 100 000, respectively. The… CONTINUE READING

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